@misc{_Proceedings, howpublished={online}, publisher={Polska Akademia Nauk. Instytut Fizyki}, language={eng}, type={czasopismo}, title={Proceedings of the XIII International Conference on Ion Implantation and Other Applications of Ions and Electrons (ION 2022) Kazimierz Dolny, Poland June 27–30 2022}, keywords={Fizyka ciała stałego}, }